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As a technique of microfabrication for a semiconductor integrated circuit, a method in which an organic film formed of resin or the like is irradiated with light to be cured and thereby patterned is known. In the lithographic method, a photoresist is used as the material of a photosensitive organic film, which is irradiated with light through a mask having a circuit pattern formed thereon to be exposed to light in an ultraviolet region. After the light is irradiated, it 66cf4387b8 kaitan
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